Test the metal content of chemicals used in semiconductor production, such as UPW, HF, HCL, HNO3, H2SO4,H3PO4, NH4OH.

Perform trace analysis (ppt level) on wafer surface and in wafer body like BOE, SC1, SC2, DEV, H2O2, IPA,NMP, etc., for.

It can detect metals including Li, Na, Mg, Al, K, Cr, Mn, Fe, Ni, Pb, Co, Ca, Ga, As, Cu, Zn, Ag, Ba, Tl,B,Bi, Cd, In, Sr, W, Si, Ti, etc., with a detection capability of 1ppt level.

It can also perform isotope separation, etc.